Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Fabrication of an Electrostatic Micro Actuator Using a Corrugated Diaphragm As an Electrode

주름진 박막을 전극으로 한 정전형 미세 구동기의 제작

  • Kim, Sung-Yoon (Dept. of Control and Instrumentation Engineering, Ajou University) ;
  • Yang, Eui-Hyeok (Dept. of Control and Instrumentation Engineering, Ajou University) ;
  • Yang, Sang-Sik (Dept. of Control and Instrumentation Engineering, Ajou University)
  • 김성윤 (아주대학교 제어계측공학과) ;
  • 양의혁 (아주대학교 제어계측공학과) ;
  • 양상식 (아주대학교 제어계측공학과)
  • Published : 1993.11.26
Download PDF
⟨ Previous Next ⟩

Abstract

In this paper, an electrostatic silicon micro actuator has been designed and fabricated using the micro machining technology. The actuator consists of two counter electrodes. One is an Al film deposited on a pyrex glass, and the other is a circular corrugated diaphragm with boron doped. The diaphragm is fabricated by boron etch stop technique using an anisotropic etchant, EPW.

Keywords