Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Fabrication of Two One-Way Silicon Micro Valves using Boron Etch Stop Layer

붕소 식각 정지층을 이용한 두 개의 한 방향 실리콘 미세 밸브의 제작

  • Seo, Jeong-Deok (Dept. of Control and Instrumentation Engr., Ajou University) ;
  • Yang, Eui-Hyeok (Dept. of Control and Instrumentation Engr., Ajou University) ;
  • Yang, Sang-Sik (Dept. of Control and Instrumentation Engr., Ajou University)
  • 서정덕 (아주대학교 제어계측공학과) ;
  • 양의혁 (아주대학교 제어계측공학과) ;
  • 양상식 (아주대학교 제어계측공학과)
  • Published : 1993.11.26
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Abstract

In this paper, a silicon microvalve has been fabricated using micromachining technology. The valve consists of the several thin silicon diaphragms which are designed to open and close depending on the pressure difference. It is supposed to pass fluids in only one direction. The thin diaphragms are fabricated by boron etch stop using an anisotropic etchant, EPW. The fabricated valve has been tested for various pneumatic pressure. According to the experimental results, the slit width of the valve increases as the pneumatic pressure increases.

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