Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1993.11a
- /
- Pages.268-271
- /
- 1993
Development and Operation Characteristics of XeCl Excimer Laser
방전여기 XeCl 엑시머레이저의 제작 및 동작특성
-
Jin, Yun-Sik
(Korea Electrotechnology Research Institute)
;
-
Lee, Hong-Sik
(Korea Electrotechnology Research Institute)
;
-
Kim, Hee-Je
(Korea Electrotechnology Research Institute)
;
- Rho, Young-Soo (Korea Electrotechnology Research Institute) ;
- Kim, Youn-Taeg (Korea Electrotechnology Research Institute)
- Published : 1993.11.26
Abstract
Discharge pumped high power excimer laser is a very useful light source of ultraviolet region. In this paper. the design and operation characteristics of UV pre-ionized discharge pumped XeCl laser are discussed. Maximum output power of 890mJ at the efficiency of 1.4% was achieved with 35kV charging voltage, 3.4atm of total pressure and 10pps of pulse repetition rate. Optimum HCl pressure is considered to be between 2.5 and 3.5torr.
Keywords