A Study of Form Measurement using Noncontact Sensor

비접촉식 센서를 사용한 형상 측정 연구

Many researches on measurement technology has been made and developed by various methods. Considering the measurement environment with cutting fluid, coolant and the like, contact type measurement methods are mostly used. But contact measurement method has measuring force and so the sensing head becomes worn. By these reasons, we considered sensors not influenced by the former fluid and so can acquire accrate measured values using error compensation due to temperature and vibration. For this purpose, eddy current sensors and Extended kalman Filter Algorithm for processing measured data has been used. In this paper, we present new technology that can be used for measuring workpiece with previous bad environment using direct method and comparison measurement method. We used cylindrical workpieces which were produced by grinding machine for the target.