Position Control of Laser Scanning Mirror Using Piezoelectric Actuator

압전작동기를 이용한 레이져 스케닝 미러의 위치제어

This paper presents the position tracking control of a laser scanning mirror system in which piezoelectic actuator is incorporated. Using the shear mode of the piezoelectric actuator,angular oscillation of a laser scanning mirror is derived. Torsion bar is rhen designed and attached to the piezoelctric actuator in order to magnify the amplitude generated by the actuator. Finite element modeling and analysis are essntial for designing the piezoelectic actuator. The torsional resonance mode of the piezoelectric actuator is found from the model analysis of the actuator and the mechanical shear is matched with the driving frequency. Transfer function between the electrical excitation and the mechanical shear deformation at resonance frequency is found form the response of the actuator calculated by the finite element analysis and the governing equation of the system is derived from d'Alembert's principle. Tracking control performance for desired trajectory which is, in fact, sinusoidal curve is presented in order to demonstrate the validity of the proposed system.