층밀리기 간섭계에 의한 정량적 수차산출에 관한 연구

A Study on Determination of Quantitative Aberration Using Lateral-Shearing Interferometer

The lateral-shearing interferometer specially devised for production line inspection lenses is presented. The interferometer is composed with immersion oil and four prisms whose relative sliding motion provide lateral-shearing and phase-shifting. A special phase-measuring algorithm of a-bucket is adopted to compensate the phase-shifting error caused by the thickness reduction in the immersion oil Three different algorithm for determinating quantitative aberration of aspherical lenses are presented and compared with one another.