대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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다이아몬드성 탄소 박막의 전계 전자 방출 특성에 관한 연구

A Study on Field Electron Emission Characteristics of Diamond-Like Carbon

  • Yeo, Seon-Young (Dept. of Electrical Engineering, Seoul National University) ;
  • Pyo, Jae-Hwack (Dept. of Electrical Engineering, Seoul National University) ;
  • Kim, Joong-Kyun (Dept. of Electrical Engineering, Seoul National University) ;
  • Whang, Ki-Woong (Dept. of Electrical Engineering, Seoul National University)
  • 발행 : 1996.11.16
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초록

DLC(Diamond-Like Carbon) films were prepared by Inductively Coupled Plasma(ICP) CVD system. It was confirmed that the field emission characteristics are closely related to the richness of C-H bonding incorporated in the DLC. According to Fowler-Nordheim equation, it is thought that the ability of DLC to emit electron at relatively low voltage is due to the field enhancement caused by the nodules of ${\sim}100nm$ size on the surface of DLC. The electric field to start field emission was about $1.4{\times}10^9V/m$ in case of DLC film deposited at input power of 400W and substrate bias of -100V.

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