Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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The Study on Formation of Pt-Co Alloy Thin Films for RTD Temperature Sensors

측온저항체 온도센서용 Pt-Co 합금박막의 형성에 관한 연구

  • Kim, Seo-Yeoun (Division of Electronics and Mechanical Eng., Dongseo university) ;
  • Noh, Sang-Soo (Division of Electronics and Mechanical Eng., Dongseo university) ;
  • Choi, Young-Kyu (Division of Electronics and Mechanical Eng., Dongseo university) ;
  • Chung, Gwiy-Sang (Division of Electronics and Mechanical Eng., Dongseo university)
  • 김서연 (동서대학교 전자기계공학부) ;
  • 노상수 (동서대학교 전자기계공학부) ;
  • 최영규 (동서대학교 전자기계공학부) ;
  • 정귀상 (동서대학교 전자기계공학부)
  • Published : 1997.07.21
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Abstract

Platinum-Cobalt alloy thin films were deposited on $Al_2O_3$ substrates by co sputtering for RTD temperature sensors. We made Pt-Co alloy resistance patterns on $Al_2O_3$ substrate by lift-off method and investigated the physical and electrical characteristics of these films under sputtering conditions (; the input power, working vacuum), annealing conditions (; temperature, time) and also after annealing these films. After the annealing treatment at $800^{\circ}C$ for 60min, the resistivity and sheet resistivity of Pt-Co thin films was $0.0302{\mu}{\Omega}{\cdot}cm$ and $0.1{\Omega}/{\square}$, respectively, and the TCR value of Pt-Co RTD was $3600ppm/^{\circ}C$ in the temperature range of $25{\sim}400^{\circ}C$. These results indicate that Pt-Co thin films have potential for the excellent RTD temperature sensors.

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