Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Pyroelectric Properties of PLT Thin Films Prepared by Sol-Gel Method

Sol-Gel 법으로 제조한 PLT박막의 초전특성

  • Chung, Jang-Ho (Dept. of Electronic Materials Eng. Kwangwoon Univ.) ;
  • Lee, Moon-Kee (Dept. of Electronic Materials Eng. Kwangwoon Univ.) ;
  • Park, In-Gil (Dept of Electronics Sinsung Junior College) ;
  • Lee, Young-Hie (Dept. of Electronic Materials Eng. Kwangwoon Univ.)
  • 정장호 (광운대학교 전자재료공학과) ;
  • 이문기 (광운대학교 전자재료공학과) ;
  • 박인길 (신성전문대학 전자과) ;
  • 이명희 (광운대학교 전자재료공학과)
  • Published : 1997.07.21
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Abstract

$(Pb_{1-x}La_x)Ti_{1-x/4}O_3$ (x=0, 0.02, 0.04, 0.06, 0.08) ceramic thin films were fabricated by Sol-Gel method. A stock solution of (Pb,La)$TiO_3$ with excess Pb 10mol% was made and spin-coated on the Pt/Ti/$SiO_2$/Si substrate at 4000rpm for 30 seconds. Coated specimens were dried on the hot-plate at $350^{\circ}C$ for 10 min and sintered at $500{\sim}750^{\circ}C$ for 1 hour. The dielectric constant, remanent polarization and coercive field of the PLT(6 at.%) thin films sintered at $650^{\circ}C$ were 884, $13.95{\mu}C/cm^2$ and 8.7kV/cm, respectively. Pyroelectric coefficient, figure of merit of pyroelectric current, voltage responsivity and detectivity of PLT(6at.%) thin films were $3.2{\times}10^{-8}\;C/cm^2K$, $1.02{\times}10^{-8}\;C{\cdot}cm/J$, $2.9{\times}10^{-11}\;C{\cdot}cm/J$, $0.29{\times}10^{-8}\;C{\cdot}cm/J$, respectively.

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