Ultraviolet-Ozone cleaning process of organic surface contamination layers

  • Moon, D.W. (Surface Analysis Groupp, Korea Research Institute of Standard and Science Yusung pp.O. #102., Taejon 305-606) ;
  • A.Kurokawa S.Ichimura (Surface Engineering Section, Electrotechnical laboratory, ibaraki, Jappan) ;
  • John, In-Cheol (Deppartment of Chemistry, Cheonbuk University, Jonju) ;
  • Lee, Hae-Won (Department of Chemistry, Cheonbuk University)
  • 발행 : 1997.07.01