한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1997년도 춘계학술대회 논문집
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- Pages.23-26
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- 1997
Pyrazine이 첨가된 TMAH/IPA 이방성 식각특성
TMAH/IPA Anisotropic Etching Characteristics with Addition of Pyrazine
초록
This work presents the TMAH/IPA anisotropic etching characteristics with addition of Pyrazine. (100) Si etching rate of 0.747
키워드