Relation between Crystal Facet and Electrical Property of Boron Doped CVD Diamond

  • Lee, Bum-Joo (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Ahn, Byung-Tae (Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Baik, Young-Joon (Thin Film Technology Research Center, Korea Institute of Science and Technology)
  • Published : 1998.05.01

Abstract

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