Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1998.06a
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- Pages.83-86
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- 1998
Ferroelectric Properties of the PZT(40/60)/(60/40) Heterolayered Thin Film Prepared by Sol-Gel Method
Sol-Gel법으로 제작한 PZT(40/60)/(60/40) 이종층 박막의 강유전특성
Abstract
Ferroelectric PZT(40/67)/PZT(60/40)heterolayered thin films were Prepared by the alkoxide-based Sol-Gel method. PZT(40/60) and PZT(60/40) stock solutions were made and spin-coated on the P7Ti/Si02/Si substrate alternately. These PZT(40/60) and PZT(60/40) films were dried at 300
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