Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1998.06a
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- Pages.79-82
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- 1998
Chemical Structure Analysis on the ONO Superthin Film by Second Derivative AES Spectra
2차 미분 AES 스펙트럼에 의한 ONO 초박막의 화학구조 분석
Abstract
Film characteristics of thin ONO dielectric layers for MONOS(metal-oxide-nitride-oxide-semiconductor) EEPRM was investigated by AES and AFM. Second derivative spectra of AES Si LVV overlapping peak provided useful information for chemical state analysis of superthin film. The ONO films with dimension of tunneling oxide 24
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