Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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ETCH CHARACTERISTICS OF FERROELECTRIC SrBi$_2$Ta$_2$O$_9$ THIN FILMS IN AN INDUCTIVELY COUPLED PLASMA

  • Chung, Chee-Won (Electronic Materials Lab, Samsung Advanced Institute of Technology) ;
  • Kim, Tae-Young (Electronic Materials Lab, Samsung Advanced Institute of Technology) ;
  • Lee, June-Key (Electronic Materials Lab, Samsung Advanced Institute of Technology) ;
  • Lee, Kyu-Sang (Dept. of Chemistry, Inha Univ.)
  • Published : 1998.08.01
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