ANALYSIS OF SrTiO$_3$STEP-FLOW GROWTH BY RHEED

  • Shin, Dong-Suk (Semiconductor materials Lab., Korea Institute of Science and Technology) ;
  • Lee, Ho-Nyung (Semiconductor materials Lab., Korea Institute of Science and Technology) ;
  • Kim,Yong-Tae (Semiconductor materials Lab., Korea Institute of Science and Technology) ;
  • Chol, In-Hoon (Dev. Of Materials Science, Korea Univ.) ;
  • Kim, Chang-Jung (Electronic Materials Lab., Materials Sector. Samsung Advanced Institute of Technology) ;
  • Kim, T.Y. (Electronic Materials Lab., Materials Sector. Samsung Advanced Institute of Technology) ;
  • Lee, J.K. (Electronic Materials Lab., Materials Sector. Samsung Advanced Institute of Technology) ;
  • Chung, Il-Sub (Electronic Materials Lab., Materials Sector. Samsung Advanced Institute of Technology)
  • Published : 1998.08.01