Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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EFFECT OF DEPOSITION CONDITIONS AT THE HETEROGENEOUS NUCLEATION SITES ON THE CRYSTALLIZATION BEHAVIOR OF LPCVD a-Si FILMS ON $SiO_2$

  • Ryu, M.K. (School of Mater. Sci. & Eng., Seoul National Univ) ;
  • Hwang, S.M. (School of Mater. Sci. & Eng., Seoul National Univ) ;
  • Min, S.H. (School of Mater. Sci. & Eng., Seoul National Univ) ;
  • Kim, K.B. (School of Mater. Sci. & Eng., Seoul National Univ)
  • Published : 1998.08.01
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