Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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TEMPORAL AGING OF SiO$_2$XEROGEL THIN FILM FOR INTERMTAL DIELECTRIC APPLICATION

  • Kim, J. H. (Dept. of Ceramic Eng., Yonsei Univ.) ;
  • Park, H. H. (Dept. of Ceramic Eng., Yonsei Univ.)
  • Published : 1998.08.01
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