THE EFFECT OF GRAIN STRUCTURE ON THE CURRENT-DENSITY IN THE BLACK EQUATION FOR AL-BASED INTERCONNECTS

  • Han, J.H. (Div. of Metals, KIST, Cheongryang) ;
  • Shin, M.C. (Div. of Metals, KIST) ;
  • Kang, S.H. (Center for Advanced Materials, Lawrence Berkeley National Laboratory, and Dept. of Material Science and Mineral Engineering, Univ. of Califorina)
  • Published : 1998.08.01