Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

Materials Research Society of Korea (한국재료학회)
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A STUDY ON THE EFFECT OF METALLIC IMPURITIES ON MICROROUGHNESS OF SI WAFER

  • Choi, Hyung-Seok (Semiconductor Materials Laboratory, Division of Materials Science Engineering, Hanyang University) ;
  • Jeon, Hyeong-Tag (Semiconductor Materials Laboratory, Division of Materials Science Engineering, Hanyang University)
  • Published : 1998.08.01
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Abstract

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