Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

1998.08a
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Pages.78.4-78
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1998

Materials Research Society of Korea (한국재료학회)

권호 표지

AUTOMIC-LAYER DEPOSITION OF SILICON NITRIDE

Yokoyama, Shin (Res. Ctr. for NANODVICES and Systems, Hiroshima Univ.) ;
Nakashima, Yoshimitu (Res. Ctr. for NANODVICES and Systems, Hiroshima Univ.) ;
Ooba, Kenji (Res. Ctr. for NANODVICES and Systems, Hiroshima Univ.)

Published : 1998.08.01

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