Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)

1998.08a
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Pages.79.4-79
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1998

Materials Research Society of Korea (한국재료학회)

권호 표지

EVALUATION OF STRESS INDUCED DEFECTS DUE TO RECESSED LOCOS PROCESS

Aoki, Yasuyuki (Res. Ctr. for Nanodevices and Systems, Hiroshima Univ.) ;
Kawakami, Nobuyuki (Res. Ctr. for Nanodevices and Systems, Hiroshima Univ.) ;
Shibahara, Kentaro (Res. Ctr. for Nanodevices and Systems, Hiroshima Univ.) ;
Yokoyama, Shin (Res. Ctr. for Nanodevices and Systems, Hiroshima Univ.)

Published : 1998.08.01

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