Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference (한국조명전기설비학회:학술대회논문집)
- 1999.11a
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- Pages.58-63
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- 1999
Development of Computer Simulation Code of Excimer Lasers and Experimental Confirmation
- Maeda, M. (Graduate School of Information Science and Electrical Engineering Kyushu University) ;
- Okada, T. (Graduate School of Information Science and Electrical Engineering Kyushu University) ;
- Muraoka, K. (Interdisciplinary Graduate School of Engineering Sciences Kyushu University) ;
- Chino, K.U. (Interdisciplinary Graduate School of Engineering Sciences Kyushu University)
- Published : 1999.11.01
Abstract
In order to analyze the discharge-pumped KrF excimer laser, computer simulation code is developed. On the other hand, the electron velocity distribution in a discharge plasma, measured by the Thomson scattering method, showed the Maxwellian, while the code predicted non-Maxwellian. This disagreement was solved by introducing the electron-electron collision into the simulation code. We also developed a simulation code on the CO2 laser-heated plasma in high-pressure Ar gas, and estimated the formation process of Ar2 excimer. The code predicted the possibility of the Ar2 laser action at 126 nm.
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