Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

Design of Low Consume Power Ty7e Micro-heaters Using SOl and Trench Structures

SOI 및 TRENCH 구조를 이용한 저소비 전력형 미세발열체의 설계

  • Jang, Soo (School of Information and Communication Eng., DongSeo Univ.) ;
  • Hong, Seok-Woo (School of Information and Communication Eng., DongSeo Univ.) ;
  • Lee, Jong-Chun (School of Mechancal System Eng., Kyungnam College of Infor.) ;
  • Chung, Gwiy-Sang (School of Information and Communication Eng., DongSeo Univ.)
  • 장수 (동서대학교 정보통신공학부) ;
  • 홍석우 (동서대학교 정보통신공학부) ;
  • 이종춘 (경남정보대학 기계시스템공학부) ;
  • 정귀상 (동서대학교 정보통신공학부)
  • Published : 1999.11.01
Download PDF
⟨ Previous Next ⟩

Abstract

This Paper Presents the optimized design of micro-heaters using 501(Si-on-insulator) substrate and oxide-filled trench structure In order to justify a lumped model approximation and thermal boundary assumptions, two-dimensional FDM(finite difference among which conduction is the dominant heat dissipation path. Compared with no-trenchs on the SOI structure, the micro-heaters with trench structures has properties of low heater loss and good thermal isolation. The simulation results show that the heater loss decreases as the number. width and distance of trenchs increases.

Keywords