대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

펄스 레이저 증착법에 의한 DLC 박막의 내마모성 특성변화

Characterization of tribologic DLC thin films fabricated by pulsed laser deposition

  • 심경석 (연세대학교 전기컴퓨터공학과) ;
  • 이상렬 (연세대학교 전기컴퓨터공학과)
  • Shim, Kyung-Suk (Department af Electrical Engineering, Yonsei University) ;
  • Lee, Sang-Yeol (Department af Electrical Engineering, Yonsei University)
  • 발행 : 1999.11.20
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초록

DLC thin films have been fabricated by pulsed laser deposition with various deposition parameters. The characterization of fabricated thin films was performed depending on the deposition parameters. As the kinetic energies provided by deposition temperature and the laser energy density were increased, the film showed graphite properties. Structural properties of the films were investigated by Raman spectroscopy. The growth energy should be optimized to fabricate high quality DLC thin films. DLC films showed high hardness and their friction coefficient was measured to be about 0.2 regardless of the load of the ball pin.

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