대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

동시 증착으로 제작한 BSCCO 박막의 초전도 특성

Superconducting Characteristics of BSCCO Thin Film Fabricated by Co-deposition

  • 이희갑 (동신대학교 전기전자공학과) ;
  • 이준웅 (광운대학교 전기공학과) ;
  • 박용필 (동신대학교 전기전자공학과)
  • Lee, Hee-Kab (Department of Electrical & Electronic Eng., Dongshin University) ;
  • Lee, Joon-Ung (Department of Electrical Eng., Kwangwoon University) ;
  • Park, Yong-Pil (Department of Electrical & Electronic Eng., Dongshin University)
  • 발행 : 1999.11.20
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초록

BSCCO thin films have been fabricated by co-deposition at an ultralow growth rate using ion beam sputtering(IBS) method. Bi 2212 phase appeared in the temperature range of 750 and $795^{\circ}C$ and single phase of Bi 2201 existed in the lower region than $785^{\circ}C$. Whereas, ozone gas pressure dependance on structural formation was scarcely observed regardless of the pressure variation. And high quality of c-axis oriented Bi 2212 thin film with $T_c$(onset) of about 90 K and $T_c$(zero) of about 45 K is obtained. Only a small amount of CuO in some films was observed as impurity, and no impurity phase such as $CaCuO_2$ was observed in all of the obtained films.

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