대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

반도체 마이크로 머시닝 기술을 이용한 전자기형 진동 트랜스듀서의 실리콘 탄성체 구현

Fabrication of Silicon Elastic Body of Electromagnetic Type Vibration Transducer by Using Micromachining Technique

  • Lee, K.C. (School of Electronic and Electrical Engineering, KNU) ;
  • Lee, S.K. (School of Electronic and Electrical Engineering, KNU) ;
  • Park, S.K. (School of Electronic and Electrical Engineering, KNU) ;
  • Kwon, K.J. (Division of Electricity, Yeungjin Junior College) ;
  • Cho, J.H. (School of Electronic and Electrical Engineering, KNU) ;
  • Lee, S.H. (Kyungpook National University Hospital)
  • 발행 : 1999.11.20
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초록

A 4-beam cross type silicon elastic body was fabricated for the electromagnetic type vibration micro transducer. To improve energy transfer efficiency, the structure and size of vibration transducer were optimized by the FEA simulation package. Experimental results of the fabricated transducer shows $0.5{\sim}8$ dyne of vibration force at the condition of $1{\sim}4$ mA of current source $100{\sim}7000$ Hz of frequency band width. These results presented the useful applications for micro actuators and sensors.

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