대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

Ni 도금 구조물을 이용한 전자력 구동 Al 미러의 제작

Fabrication of Al mirror with Ni electroplated structure for magnetic actuation

  • 임태선 (서울대학교 전기 컴퓨터 공학부) ;
  • 김용권 (서울대학교 전기 컴퓨터 공학부) ;
  • 최형 (삼성 전자)
  • Lim, Tae-Sun (School of Electrical and Computer Engineering, Seoul National University) ;
  • Kim, Yong-Kweon (School of Electrical and Computer Engineering, Seoul National University) ;
  • Choi, Hyung (Samsung Electronics)
  • 발행 : 2000.07.17
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초록

In this study, we fabricated surface micromachined mirror that is actuated by magnetic force. The mirror was fabricated with Al, and Ni was electroplated on the surface of Al mirror as a magnetic material. The fabricated mirror is actuated by magnetic force of simple solenoid. The maximum deflection angle is about 70$^{\circ}$ when the applied magnetic field is about $1.5{\times}10^4$A/m.

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