마이크로머시닝 기술을 이용한 spiral inductor의 제작 및 시뮬레이션 결과

Fabrication and Simulation Results of Spiral Inductors using the Micromachining Technology

The purpose of this paper is to demonstrate for the design and the fabrication of suspended spiral inductors using the micromachining technology. Also. the characteristics of spiral inductors with substrate lossless are simulated by lumped-element model. The absence of the lossy silicon substrate after micormachining results in significantly improved quality factor characteristics of 14. Micromachined spiral inductors have the improvement of a quality factor of about 60% than spiral inductors on silicon which is not micromachined.