Transmittance measurement for thickness control of ITO layer

ITO막의 두께 제어를 위한 투과율 측정

A sensor system which can measure the transmittance of ITO(Indium Tin Oxide) layed glass is proposed. The sensor system includes a single wavelength laser beam source, photo diodes and electronic circuit processing sensor signal. The wavelength of laser is 543.5 m, this is most sensitive wavelength to photopic and scotopic vision. We applied the sensor to measure transmittance of ITO layer on general manufacturing environment and verified the effectiveness of sensor through experimental measurement.