Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2000.05a
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- Pages.1051-1054
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- 2000
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- 2005-8446(pISSN)
Development of micro check valve with polymer MEMS process for medical cerebrospinal fluid (CSF) shunt system
Polymer MEMS 공정을 이용한 의료용 미세 부품 성형 기술 개발
- Chang, J.K. (School of Electrical Eng. And Computer Science, Seoul Nat'l Univ.) ;
- Park, C.Y. (Dept. of Biomedical Eng., SNU) ;
- Chung, S. (School of Mechanical Engineering, SNU) ;
- Kim, J.K. (Dept. of Biomedical Engineering, SNU) ;
- Park, H.J. (KITECH) ;
- Na, K.H. (KITECH) ;
- Cho, N.S. (KITECH) ;
- Han, D.C. (School of Mechanical Engineering, SNU)
- 장준근 (서울대 전기컴퓨터공학부) ;
- 박찬영 (서울대 의공학과) ;
- 정석 (서울대 기계항공공학부) ;
- 김중경 (서울대 의공학과) ;
- 박훈재 (생산기술연구원) ;
- 나경환 (생산기술연구원) ;
- 조남선 (생산기술연구원) ;
- 한동철 (서울대 기계항공공학부)
- Published : 2000.05.01
Abstract
We developed the micro CSF (celebrospinal fluid) shunt valve with surface and bulk micromachining technology in polymer MEMS. This micro CSF shunt valve was formed with four micro check valves to have a membrane connected to the anchor with the four bridges. The up-down movement of the membrane made the CSF on & off and the valve characteristic such as open pressure was controlled by the thickness and shape of the bridge and the membrane. The membrane, anchor and bridge layer were made of the
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