Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.11b
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- Pages.394-397
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- 2001
The study of the properties of PZT thin films deposited on $Ru/RuO_{2}$ electrode
$Ru/RuO_{2}$ 이중 전극위에 성장한 PZT 박막의 특성에 관한 연구
Abstract
In this paper, in-situ deposited