Machining of Anode and Cavity applying Ultraprecision Machining Characteristics of OXFC

무산소동의 초정밀 절삭 특성을 이용한 아노드 및 캐비티의 가공

Klystron which is micro wave amplifier tube are mainly used in fields of science such as accelerator, nuclear fusion, broadcasting, communication fields, and defense industry fields, tract. The quality of Klystron anode and cavity are determined by form accuracy and roughness of the worked surface. Therefore anode and cavity are restricted the from accuracy strictly and the surface roughness be under Rmax 0.03S. As a work material of anode and cavity, the oxygen-free copper, that is used for optical pares of aerospace and laser mirror is selected. An outside diameter of material is $\Phi$100 mm and an inside diameter is $\Phi$30~33 mm. In this study, to find the optimum ultra precision cuffing condition of oxygen-free copper with diamond turning machine, the surface roughness is examined for various diamond toot nose radius, main spindle speed, fred rate and depth of cut. As a result of experiment, we could machined the anode and cavity with a surface roughness within Ra 3.2 nm, a form accuracy within 0.01 $\mu\textrm{m}$.