한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

$SF_{6}$-Ar혼합가스에서의 압력 의존도 해석

The analysis of dependence on the gas number density in $SF_{6}$-Ar mixtures

  • 전병훈 (중부대학교 정보공학부 전기전자공학과) ;
  • 하성철 (동국대학교 전기공학과)
  • 발행 : 2002.07.01
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초록

We measured the electron drift velocity, W, in 0.5% $SF_{6}$-Ar mixture over the E/N range from 30 Td to 300 Td and gas pressure range from 0.1 to 8 Torr by the double shutter drift tube with a variable drift distance. This coefficient in the mixture was calculated over the same E/N and gas pressure range by using the two-term approximation of the Boltzmann equation. And the measured and calculated values at different gas number density at each E/N was appreciable dependence in the results on the gas number density,

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