한국정보디스플레이학회:학술대회논문집
- 2002.08a
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- Pages.621-624
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- 2002
The Outgasing characteristics of MgO film for protecting layer of plasma display panel
- Song, Byoung-Kwan (Department of Materials Engineering, Sungkyunkwan University) ;
- Lee, Young-Joon (Department of Materials Engineering, Sungkyunkwan University) ;
- Lee, Chang-Heon (Department of Materials Engineering, Sungkyunkwan University) ;
- Hwang, Hyun-Ki (Department of Materials Engineering, Sungkyunkwan University) ;
- Yeom, Guen-Young (Department of Materials Engineering, Sungkyunkwan University)
- Published : 2002.08.21
Abstract
In this study, outgassing characteristics of MgO films, and the plasma cleaning effects of the deposited MgO films by atmospheric pressure plasma on outgassing rate were compared. The MgO layer was heated up to 350
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