Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Fabrication of the Micro Valve with Free Floating Structure

Free Floating 구조를 갖는 마이크로 밸브의 제작

  • Son, Mi-Young (School of electrical and computer engineering, University of Seoul) ;
  • Mun, Byung-Phil (School of electrical and computer engineering, University of Seoul) ;
  • Jeon, Ho-Seung (School of electrical and computer engineering, University of Seoul) ;
  • Han, Jin-Woo (School of electrical and computer engineering, University of Seoul) ;
  • Kim, Chul-Ju (School of electrical and computer engineering, University of Seoul)
  • 손미영 (서울시립대학교 전자전기컴퓨터공학부) ;
  • 문병필 (서울시립대학교 전자전기컴퓨터공학부) ;
  • 전호승 (서울시립대학교 전자전기컴퓨터공학부) ;
  • 한진우 (서울시립대학교 전자전기컴퓨터공학부) ;
  • 김철주 (서울시립대학교 전자전기컴퓨터공학부)
  • Published : 2002.11.07
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Abstract

Previous valves have initial gap problem, high voltage or high pressure problem. In this paper, various micro valves with free floating structure have been fabricated and tested to solve the initial gap and high pressure problems. The paper presents how to etch Parylene-C which is a valve cap material without A1 mask layer. The maximum flow-rate of fabricated micro valve is$118{\mu\ell}$/min with $370{\mu}m$ orifice size and the leakage at the initial and reverse pressure is not observed.

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