Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

Electrical properties of NiCr thin films deposited by rf magnetron sputtering

RF magnetron sputtering 방법으로 제작한 NiCr 박막의 전기적특성

  • Kim, Dae-Yeon (School of Materials Science and Engineering, University of Ulsan) ;
  • Kwon, Jeong-Ho (School of Materials Science and Engineering, University of Ulsan) ;
  • Jeong, Yeon-Hak (School of Materials Science and Engineering, University of Ulsan) ;
  • Lee, Jae-Shin (School of Materials Science and Engineering, University of Ulsan)
  • 김대연 (울산대학교 첨단소재공학부) ;
  • 권정호 (울산대학교 첨단소재공학부) ;
  • 정연학 (울산대학교 첨단소재공학부) ;
  • 이재신 (울산대학교 첨단소재공학부)
  • Published : 2002.11.07
Download PDF
⟨ Previous Next ⟩

Abstract

Precision resistors were prepared by controlling the concentration of Ni and Cr deposited on cylindrical alumina substrates (diameter: 1.7mm, length: 5.5mm). Deposited films were analyzed with FESEM, AES, and AFM. As the amount of Cr in the film increases, the TCR was shifted to negative direction.

Keywords