한국윤활학회:학술대회논문집 (Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference)
- 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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- Pages.439-440
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- 2002
Development of Ceria-Based Slurry with High Selectivity for STI CMP
- Lim, G. (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
- Kim, T.E. (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
- Kim, J. (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
- Lee, J.H. (Nano-Materials Research Center, Korea Institute of Science and Technology) ;
- Lee, H.W. (Nano-Materials Research Center, Korea Institute of Science and Technology)
- 발행 : 2002.10.21
초록
Nano-Crystalline