한국마이크로전자및패키징학회:학술대회논문집 (Proceedings of the International Microelectronics And Packaging Society Conference)

한국마이크로전자및패키징학회 (The Korean Microelectronics and Packaging Society)
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압전체를 이용한 약품 분사용 초음파 분사노즐 시스템

Ultrasonic Spray Nozzle System with Piezoelectric Device for Chemicals Dispersion

  • 고재석 (아주대학교 재료공학과) ;
  • 김용현 (아주대학교 재료공학과) ;
  • 최승철 (아주대학교 재료공학과)
  • Koh Jea Seok (Department of Materials Science and Engineering, Ajou University) ;
  • Kim Yong Hyun (Department of Materials Science and Engineering, Ajou University) ;
  • Choi Seung Chul (Department of Materials Science and Engineering, Ajou University)
  • 발행 : 2003.11.01
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초록

A new type of ultrasonic spray nozzle was fabricated with piezoelectric devices. The spray nozzle was designed for the chemicals dispersion in the water purification bath. The piezoelectric properties in ultrasonic spray nozzles were optimized for the better dispersion of chemicals for purification process. Ultrasonic spray nozzle was packaged in metal case with silicone resin for the water proof application.

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