RF Magnetron Sputtered Conducting $La_{1/2}Sr{1/2}CoO_3$ Electrode on $PbZr_{0.4}Ti_{0.6}O_3$ Thin Film

  • Kim Jai-Hyun (Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim Hyoun Soo (Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Choo Woong Kil (Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kuh Bong Jin (Process Development Team, Semiconductor R & D Center, Samsung electronics Company) ;
  • Im Ki Vin (Process Development Team, Semiconductor R & D Center, Samsung electronics Company) ;
  • Park Soon Ho (Process Development Team, Semiconductor R & D Center, Samsung electronics Company)
  • Published : 2003.12.01