Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)

The Institute of Electronics and Information Engineers (대한전자공학회)
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A study on the heat treatment effects of ZnO:Al transparent conductive thin films

ZnO:Al 투명도전막의 열처리특성에 대한 연구

  • 유원규 (경상대학교 전자재료공학과 및 항공기부품기술연구센터) ;
  • 홍천일 (경상대학교 전자재료공학과 및 항공기부품기술연구센터) ;
  • 김정규 (경상대학교 전자재료공학과 및 항공기부품기술연구센터) ;
  • 이형기 (신평물산 주식회사) ;
  • 전춘배 (연암공업전문대학) ;
  • 박기철 (경상대학교 전자재료공학과 및 항공기부품기술연구센터)
  • Published : 1998.06.01
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Abstract

The effect of the heat treatment of the AZO transparent conductive film prepared by rf magnetron sputtering was investigated. The variations of the electrical and optical properties with heat treatment ambient and temperature were studied. After the heat treatment in air above 300.deg. C, the resistivity of AZO films increased by 1 to 8 orders of magnitude. However, no significant change in the AZO films after th eheat treatment in vacuum was not observed.

Keywords