Analysis and Fabrication of the Mode Conversion Type Ultrasonic Motor Using Finite Element Method

유한요소법을 이용한 모드변환형 초음파 모터의 해석 및 제작

An ultrasonic motor is a motor which uses vibration -a type of elastic vibration- to obtain a driving force, which then drives the motor using friction. In this paper, mode conversion type - single resonance mode ultrasonic rotary motor that use langevin type ultrasonic vibrator was studied. This model was proposed for the first time by Japanese Kumada in 1985. In this study, finite element analysis (FEA) of a stator and bidirectional driving characteristic of a rotor was newly obtained. The amplitude and phase of displacement and elliptical trajectory of beam was confirmed by FEA The fabricated motor was operated to clockwise and counterclockwise in 40.8 [kHz] and 44.2 [kHz] respectively. But bidirectional driving characteristics did not coincide each other.