한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)
- 한국공작기계학회 2004년도 추계학술대회 논문집
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- Pages.269-273
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- 2004
안정화된 간섭계와 FFT를 이용한 표면 측정
Surface profile measurement with FFT method and stabilized interferometer
초록
The moduled interferometer with waveplates, polarizing beam splitter, etc. for four phase shifted interference patterns was stabilized with the and Fast Fourier Transform (FFT) method was used to investigate the surface profile measurement from the interferenece pattern from Twyman-Green interferometer using a mathcad.