한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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- Pages.932-934
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- 2004
FeSiB 박막을 이용한 SAW 필터의 제작
Fabrication of the SAW filter Using a FeSiB films
- Park, K.Y. (Dong-A Univ) ;
- Son, J.Ch. (KIST) ;
- Shin, K.H. (Kyung-Sung Univ) ;
- Lim, S.H. (KIST) ;
- SaGong, Geon (Dong-A Univ)
- 발행 : 2004.07.05
초록
Due to the increasing variety and capacity of information and communication media, systems of microwave band communication have branched out extensively. Surface acoustic wave (SAW) devices fabricated FeSiB thin films on quartz substrate were deposited by RF magnetron sputter and by photolithographic processes. This device is with a center frequency 146MHz and the insertion loss as low as -43dB was obtained.
키워드