한국정보디스플레이학회:학술대회논문집

한국정보디스플레이학회 (The Korean Infomation Display Society)
권호 표지

LTPS Technology in ERSO

  • Liu, David N. (Electronics Research and Service Organization Industrial Technology Research Institute) ;
  • Yeh, Yung-Hui (Electronics Research and Service Organization Industrial Technology Research Institute)
  • 발행 : 2004.08.23
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초록

A Poly-Si and a ITO films with surface roughness 1.8 nm and 0.5 nm of root mean square ($R_{rms}$ vakue) values were developed, respectively. A 3 inch UXGA LTPS TFT-LCD with 667 ppi resolution and a 10 inch VGA LTPS OLED have been developed and demonstrated using PMOS technology.

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