한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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- Pages.13-17
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- 2004
식각된 PZT 박막의 전기적 특성 개선에 관한 연구
Electrical properties improvement of PZT thin films etched into $CF_4/(Cl_2+Ar)$ plasma
- Koo, Seong-Mo (Chung-Ang Uni.) ;
- Kim, Dong-Pyo (Chung-Ang Uni.) ;
- Kim, Kyoung-Tae (Chung-Ang Uni.) ;
- Kim, Chang-Il (Chung-Ang Uni.)
- 발행 : 2004.04.24
초록
The PZT thin films are well-known material that has been widely studied for ferroelectric random access memory (FRAM). We etched the PZT thin films by