Response and Modal Analyses of Micro Double Cantilever Beams Interacted by Electrostatic Force

정전기력을 받는 마이크로 이중 외팔 보의 응답 및 모드 해석

Static and dynamic responses of micro double cantilever beam structures interacted by electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as natural frequencies are estimated for several sets of beam properties and applied voltages. It is shown that the variations of beam properties resulted by manufacturing process influence the deflections and the modal characteristics significantly. Such information can be usefully employed for the design of MEMS structures.