EDDC deposition system for 100m long superconducting coated conductor

100m 급 초전도선재 제조용 EDDC 증착시스템

EDDC(Evaporation using Drum in Dual Chamber) deposition system was manufactured for 100m long superconducting coated conductor. It is composed of reaction chamber, evaporation chamber and differential chamber. The drum is located across the differential and exposed to both of the evaporation chamber and the reaction chamber, and the tape is wound on the drum. The elements of superconducting material are co-evaporated from respective element boats in the evaporation chamber and deposited on the drum and reacted with oxygen in the reaction chamber. This process repeats by rotating the drum. When the total pressure of the reaction chamber was 5 mTorr, that of the evaporation chamber was $5{\sim}10^{-5}$Torr. This atmosphere can be achieved by means of differential pumping. There are four evaporator in the evaporation chamber. One is the radiation heating evaporator and the others are the high frequency induction evaporator. EDDC is one of promising methods for commercialization of superconducting coated conductor.