Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

  • 2005.06a
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  • Pages.1198-1201
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  • 2005
  • /
  • 2005-8446(pISSN)
Korean Society for Precision Engineering (한국정밀공학회)
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A Study on a Foxtail Electrostatic Microactuator with a High Resolution

고해상도의 Foxtail형 정전력 마이크로구동기에 대한 연구

  • Kim Man-Geun (Dept. of Mechatronics, Gwangju Institute of Science and Technology(GIST)) ;
  • Kim Young-Yun (Dept. of Mechatronics, Gwangju Institute of Science and Technology(GIST)) ;
  • Jo Kyoung-Woo (Dept. of Mechatronics, Gwangju Institute of Science and Technology(GIST)) ;
  • Lee Jong-Hyun (Dept. of Mechatronics, Gwangju Institute of Science and Technology(GIST))
  • 김만근 (광주과학기술원 기전공학과 MEMS & NanoPhotonics Lab) ;
  • 김영윤 (광주과학기술원 기전공학과 MEMS & NanoPhotonics Lab) ;
  • 조경우 (광주과학기술원 기전공학과 MEMS & NanoPhotonics Lab) ;
  • 이종현 (광주과학기술원 기전공학과 MEMS & NanoPhotonics Lab)
  • Published : 2005.06.01
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Abstract

A new foxtail actuator driven by V-shape beam deflection using electrostatic force has been designed, fabricated and characterized for nano-resolution manipulators. The proposed foxtail mechanism was implemented using a pair of electrostatic actuators and a pair of holding actuators, which was analyzed based on the electromechanically coupled motion of voltage - displacement relation. The proposed actuator was fabricated onto Silicon-on-Insulator (SOI) wafer and its stepping characteristics were measured by micro optical interferometer consisting of integrated micromirror and optical fiber. The fabricated foxtail microactuator was successfully operated from 1nm to 76nm, and the magnitude of step displacement was controllable up from 26nm/cycles to 53nm/cycle by changing the voltage.

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