Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on design of the PZT Cantilever for Micro Switch

Micro Switch용 PZT Cantilever의 설계에 관한 연구

  • Kim, In-Sung (Korea Electrotechnology Research Institute, IMT Romania) ;
  • Song, Jae-Sung (Korea Electrotechnology Research Institute, IMT Romania) ;
  • Min, Bok-Ki (Korea Electrotechnology Research Institute, IMT Romania) ;
  • Jeong, Soon-Jong (Korea Electrotechnology Research Institute, IMT Romania) ;
  • Muller, A. (Korea Electrotechnology Research Institute, IMT Romania)
  • 김인성 (한국전기연구원 전자기소자연구그룹) ;
  • 송재성 (한국전기연구원 전자기소자연구그룹) ;
  • 민복기 (한국전기연구원 전자기소자연구그룹) ;
  • 정순종 (한국전기연구원 전자기소자연구그룹) ;
  • Published : 2005.07.07
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Abstract

RF Micro switches is a miniature device or an array of integration devices and mechanical components and fabricated with Ie batch-processing techniques. RF Micro switches application area are in phased arrays and reconfigurable apertures for defence and telecommunication systems, switching network for satellite communication, and single-pole double throw switches for wireless application. Recently, RF Micro switches have been developed for the application to the milimeter wave system. RF Micro switches offer a substantilly higher performance than PIN diode or FET switches. In this paper, SPDT(single-pole-double-throw) switch are designed to use 10 GHz. Actuation voltage and displacement are simulated by tool.

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